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15/30291643 DC:2015
BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods
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Summary
Straight;Auger electron spectroscopy;Surface chemistry;Photoelectron spectroscopy;Electron emission;Resolution;Spectroscopy;Surfaces;Dimensional measurement;Chemical analysis and testing;Side;Electron physics;X-ray photoelectron spectroscopy
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 03/03/2015 |
| Page Count | 58 |
| Themes | X-ray photoelectron spectroscopy |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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30/11/2006
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30/11/2006
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