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18/30383935 DC:2018
BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
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Summary
Durability;Sensors;Thin films;Test methods;Semiconductor devices;Electromechanical storage;Environmental testing;Piezoelectric devices
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 12/04/2018 |
| Page Count | 19 |
| Themes | Piezoelectric devices |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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