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23/30454370 DC:2023
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength nanoscale membrane
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Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 04/19/2023 |
| Page Count | 15 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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