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23/30481371 DC:2023
BS EN IEC 62047-4 Semiconductor devices. Micro-electromechanical devices Part 4. Generic specification for MEMS
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Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 10/20/2023 |
| Page Count | 21 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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