ASTM F1367-98
Superseded Standard
Historical

ASTM F1367-98

Standard Specification for Chromium Sputtering Targets for Thin Film Applications
Most recent standard

Summary

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

Technical characteristics

Publisher American Society for Testing and Materials (ASTM International)
Publication Date 08/10/1998
Collection
Page Count 2
Themes Metallic coatings
EAN ---
ISBN ---
Weight (in grams) ---
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