ASTM F154-00
Superseded Standard
Historical

ASTM F154-00

Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces
Most recent standard

Summary

1.1 The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68 .

Technical characteristics

Publisher American Society for Testing and Materials (ASTM International)
Publication Date 01/10/2001
Collection
Page Count 13
Themes Properties of surfaces
EAN ---
ISBN ---
Weight (in grams) ---
No products.

Previous versions

Contact us