Withdrawn
Standard
Most Recent
ASTM F388-84
Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)
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Technical characteristics
| Publisher | American Society for Testing and Materials (ASTM International) |
| Publication Date | 09/10/2024 |
| Cancellation Date | 08/15/1993 |
| Collection | |
| Page Count | 6 |
| Themes | Semiconducting materials |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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