Withdrawn , Reaffirmed Standard
Most Recent

ASTM F78-97(2002)

Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards (Withdrawn 2008)

Summary

1.1 This test method covers a procedure for calibrating a mass spectrometer-type helium leak detector with a series of commercially available calibrated leaks without need for recourse to a primary standard.

1.2 Leak detector parameters determined by this test method include:

1.2.1 Minimum detectable signal, drift noise (8.5, with recorder; 8.6, without recorder),

1.2.2 Response time,

1.2.3 Minimum detectable leak rate, and

1.2.4 Sensitivity.

1.3 This standard does not purport to address the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Technical characteristics

Publisher American Society for Testing and Materials (ASTM International)
Publication Date 01/01/1991
Confirmation Date 12/10/2002
Cancellation Date 07/30/2008
Collection
Page Count 7
Themes Semi-conductor devices in general
EAN ---
ISBN ---
Weight (in grams) ---