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BS EN 62047-10:2011
Semiconductor devices. Micro-electromechanical devices Micro-pillar compression test for MEMS materials
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Summary
Compression testing;Semiconductor technology;Test specimens;Electronic equipment and components;Stress;Integrated circuits;Electromechanical devices;Semiconductor devices;Strain measurement
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 09/30/2011 |
| Page Count | 18 |
| Themes | Strain measurement |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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