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BS EN 62047-11:2013
Semiconductor devices. Micro-electromechanical devices Test method for coefficients of linear thermal expansion free-standing materials micro-electromechanical systems
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Summary
Electromechanical devices;Semiconductor technology;Terminology;Integrated circuits;Vocabulary;Semiconductor devices;Electronic equipment and components
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 10/31/2013 |
| Page Count | 24 |
| Themes | Electronic equipment and components |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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