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BS EN 62047-16:2015
Semiconductor devices. Micro-electromechanical devices Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection
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Summary
Integrated circuits;Electronic equipment and components;Vocabulary;Terminology;Semiconductor technology;Semiconductor devices;Electromechanical devices
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 07/31/2015 |
| Page Count | 18 |
| Themes | Electromechanical devices |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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