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BS EN 62047-17:2015
Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films
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Summary
Test specimens;Semiconductor technology;Electromechanical devices;Test equipment;Axial stress;Tensile testing;Semiconductor devices;Electronic equipment and components;Thin films
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 07/31/2015 |
| Page Count | 34 |
| Themes | Thin films |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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