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BS EN 62047-2:2006
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
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Summary
Integrated circuits;Thin films;Test equipment;Tensile testing;Electronic equipment and components;Electromechanical devices;Semiconductor technology;Semiconductor devices;Test specimens
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 11/30/2006 |
| Page Count | 16 |
| Themes | Test specimens |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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30/11/2006
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