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BS EN 62047-21:2014
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
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Summary
Vibration;Semiconductor technology;Fatigue testing;Test specimens;Semiconductor devices;Resonance;Electronic equipment and components;Test equipment;Thin-film devices;Bend testing;Electromechanical devices;Integrated circuits
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 10/31/2014 |
| Page Count | 18 |
| Themes | Integrated circuits |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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