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BS EN 62047-3:2006
Semiconductor devices. Micro-electromechanical devices Thin film standard test piece for tensile testing
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Summary
Specimen preparation;Tensile testing;Control samples;Electromechanical devices;Integrated circuits;Semiconductor technology;Semiconductor devices;Test specimens;Electronic equipment and components;Thin films
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 11/30/2006 |
| Page Count | 12 |
| Themes | Thin films |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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