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BS EN 62047-6:2010
Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
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Summary
Integrated circuits;Tensile testing;Thin films;Test specimens;Fatigue testing;Semiconductor devices;Test equipment;Semiconductor technology;Electromechanical devices;Axial stress;Electronic equipment and components
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 04/30/2010 |
| Page Count | 20 |
| Themes | Electronic equipment and components |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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