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BS IEC 62047-30:2017
Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics MEMS piezoelectric thin film
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Summary
Thin-film circuits;Integrated circuit manufacture;Semiconductor technology;Electromechanical devices;Electronic equipment and components;Semiconductor devices
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 10/09/2017 |
| Page Count | 24 |
| Themes | Semiconductor devices |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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