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BS IEC 62047-37:2020
Semiconductor devices. Micro-electromechanical devices Environmental test methods of MEMS piezoelectric thin films for sensor application
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Summary
Durability;Sensors;Thin films;Test methods;Semiconductor devices;Electromechanical storage;Environmental testing;Piezoelectric devices
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 04/05/2023 |
| Page Count | 20 |
| Themes | Piezoelectric devices |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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