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BS IEC 62047-44:2024
Semiconductor devices. Micro-electromechanical devices Test methods for dynamic performances of MEMS resonant electric-field-sensitive
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Summary
Electric fields;Resonant frequency;Performance;Performance testing;Testing methods;Electromechanical devices;Semiconductor devices;Semiconductor technology
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Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 02/29/2024 |
| Page Count | 22 |
| Themes | Semiconductor technology |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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