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BS IEC 63068-4:2022
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Procedure identifying and evaluating using a combined method optical inspection photoluminescence
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Summary
Semiconductor devices;Silicon carbide;Defects;Inspection;Evaluation
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 09/07/2022 |
| Page Count | 28 |
| Themes | Evaluation |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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