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BS ISO 12406:2010
Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon
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Summary
Surface chemistry;Arsenic;Interferometry;Depth;Determination of content;Chemical analysis and testing;Silicon;Surfaces;Ions;Profile measurement;Mass spectrometry;Secondary
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 11/30/2010 |
| Page Count | 24 |
| Themes | Secondary |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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