BS ISO 13083:2015
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BS ISO 13083:2015

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Summary

Surface properties;Surfaces;Sampling methods;Microscopes;Data representation;Chemical analysis and testing;Calibration;Surface chemistry

Technical characteristics

Publisher British Standards Institution (BSI)
Publication Date 08/31/2015
Page Count 26
Themes Surface chemistry
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