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BS ISO 14237:2010
Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
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Summary
Surface properties;Ions;Specimen preparation;Concentration (chemical);Single;Control samples;Calibration;Doping agents;Secondary;Determination of content;Boron;Silicon;Isotopes;Homogeneity;Surface chemistry;Mathematical calculations;Performance testing;Semiconductor technology;Chemical analysis and testing;Statistical methods of analysis;Mass spectrometry;Spectroscopy;Crystals;Precision;Test equipment
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 08/31/2010 |
| Page Count | 30 |
| Themes | Test equipment |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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