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BS ISO 14706:2014
Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
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Summary
Fluorimetry;Chemical analysis and testing;Density;Epitaxial layers;Surfactants;Contamination;Surfaces;X-ray analysis;Reflection;X-ray fluorescence spectrometry;Surface properties;Silicon;Contaminants;Surface chemistry;Substrates (insulating);Atoms
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 07/31/2014 |
| Page Count | 36 |
| Themes | Atoms |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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