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BS ISO 15632:2021
Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
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Summary
Semiconductor diodes;Detectors;Semiconductors;X-ray fluorescence spectrometry;Spectroscopy;Electron beams;Chemical analysis and testing
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 02/22/2021 |
| Page Count | 22 |
| Themes | Chemical analysis and testing |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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