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BS ISO 16531:2020

Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Summary

Surfaces;Surface chemistry;Optical measurement;Chemical composition;Glow discharges;Quantitative analysis;Spectroscopy;Chemical analysis and testing;Thickness;Mass

Technical characteristics

Publisher British Standards Institution (BSI)
Publication Date 10/06/2020
Page Count 28
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