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BS ISO 20341:2003

Surface chemical analysis. Secondary-ion mass spectrometry. Method for estimating depth resolution parameters with multiple delta-layer reference materials

Summary

Mass spectrometry;Statistical methods of analysis;Spectroscopy;Normal distribution;Surface chemistry;Chemical analysis and testing;Damping coefficient;Depth measurement;Surface properties;Test methods;Mathematical calculations;Secondary;Ions;Depth

Technical characteristics

Publisher British Standards Institution (BSI)
Publication Date 08/08/2003
Page Count 14
Themes Depth
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