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BS ISO 8181:2023
Atomic layer deposition. Vocabulary
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Summary
Atomic energy;Atomic structure;Nanomaterials;Nanoparticles;Inert gases;Exposure time;Vacuum apparatus;Vocabulary
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 11/17/2023 |
| Page Count | 18 |
| Themes | Vocabulary |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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