DIN 32564-2:2004-05
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DIN 32564-2:2004-05

Production equipment for micro-systems - Terms and definitions - Part 2: Basic technologies and production

Summary

This document defines terms, which relate to the basic technologies used for the production of micro-systems. Its purpose is to ease the communication about technical issues by harmonization of the vocabulary.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 05/01/2004
Page Count 5
EAN ---
ISBN ---
Weight (in grams) ---
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