DIN 32566:2007-12
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DIN 32566:2007-12

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Summary

This standard specifies the outer dimensions for a support ring for X-ray lithography masks. Masks from different users are intended to be used in different irradiation equipments. This standard does not specify the inner dimensions of the support ring, the fixation of the mask membrane on the support ring and the geometry of the layout field. It is therefore intended not to constrain future developments.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 12/01/2007
Page Count 9
EAN ---
ISBN ---
Weight (in grams) ---
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