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Draft standard
Historical
DIN 32567-2:2012-07
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
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Summary
This document describes specimens for topographic layer thickness measurements to study the systematic effects that occur when layer and substrate have different physical properties.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 07/01/2012 |
| Cancellation Date | 10/01/2014 |
| Page Count | 14 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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