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DIN 32567-4:2015-06
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures
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Summary
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 06/01/2015 |
| Page Count | 13 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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