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DIN 50434:1986-02
Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces
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Summary
Prüfung von Materialien für die Halbleitertechnologie; Nachweis von Kristalldefekten in Silicium-Einkristallen mittels Ätztechnik an {111}- und {100}-Flächen
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 02/01/1986 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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