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DIN 50436:1976-10

Testing of semi-conducting inorganic materials - Measurement of the metalurgic thickness of epitaxial layers of silicon by the stacking fault method

Summary

Prüfung halbleitender anorganischer Stoffe - Messung der metallurgischen Dicke von Silicium-Epitaxieschichten nach der Stapelfehlermethode

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 10/01/1976
Page Count 8
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