DIN 50443-1:1988-07
Withdrawn Standard
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DIN 50443-1:1988-07

Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography

Summary

Prüfung von Materialien für die Halbleitertechnologie; Nachweis von Kristalldefekten und Inhomogenitäten in Halbleiter-Einkristallen mittels Röntgentopographie; Silicium

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 07/01/1988
Page Count 8
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ISBN ---
Weight (in grams) ---
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