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Standard
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DIN 50446:1995-09
Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers
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Summary
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung der Defektarten und Defektdichten in Silicium-Epitaxieschichten
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 09/01/1995 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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