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DIN 50450-1:1987-08
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell
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Summary
The standard determines a test method for the determination of water impurity in carrier gases and doping gases (H2, O2, N2, Ar, He) used in the semi conductor technology.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 08/01/1987 |
| Page Count | 2 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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