DIN 50450-4:1993-09
Withdrawn Standard
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DIN 50450-4:1993-09

Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C<(Index)1>-C<(Index)3>-hydrocarbons in nitrogen by gas-chromatography

Summary

This document specifies a method for the determination of the volume part of C1-C3-hydrocarbons in nitrogen in the range between 0,2 and 10 µl/l.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 09/01/1993
Page Count 2
EAN ---
ISBN ---
Weight (in grams) ---
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