DIN 50450-9:2020-11

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Essais des matériaux pour la technologie des semi-conducteurs - Détermination des impuretés dans les gaz vecteurs et les gaz dopants - Partie 9: Dosage de l'oxygène, de l'azote, du monoxyde de carbone, du dioxyde de carbone, de l'hydrogène et des hydrocarbures C1-C3 par chromatographie en phase gazeuse dans le chlorure d'hydrogène gazeux

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography