Superseded
Standard
Historical
DIN 50451-5:2010-03
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram
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Summary
This document gives a guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation used for the determination of trace elements in high-purity chemical products for semiconductor technology. It is applicable for determinations of trace elements in ranges of micrograms per kilogram and nanograms per kilogram.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 03/01/2010 |
| Page Count | 11 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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