DIN 50451-6:2012-11
Superseded Draft standard
Historical

DIN 50451-6:2012-11

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH<(Index)4>F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid
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Summary

This document specifies methods of testing ammonium fluoride solutions (NH4F) and etching mixtures made of high-purity ammonium fluoride and hydrofluoric acid for extremely small traces of 36 elements using the inductively coupled plasma mass spectrometry (ICP-MS).

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 11/01/2012
Cancellation Date 11/01/2014
Page Count 13
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ISBN ---
Weight (in grams) ---
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