Superseded Draft standard
Historical

DIN 50451-7:2017-02

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

Summary

This document specifies methods of testing hydrochloric acid for small traces of 31 elements using the inductively coupled plasma mass spectrometry (ICP-MS).

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 02/01/2017
Cancellation Date 09/01/2017
Page Count 14
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