DIN 50452-1:1995-11
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DIN 50452-1:1995-11

Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles

Summary

This method cover the determination of the concentration of particulate matter contamination from liquids isolated on a membrane filter by microscopic counting. The scope is limited to sizing particles of 5 µm and more.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 11/01/1995
Page Count 4
EAN ---
ISBN ---
Weight (in grams) ---
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