DIN 50452-3:1995-10
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DIN 50452-3:1995-10

Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters

Summary

The document describes methods for the determination of measuring deviations of particle sizes, particle concentrations and the resolving capacity of optical particle counters based upon measuring of the laser light-scattering.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 10/01/1995
Page Count 6
EAN ---
ISBN ---
Weight (in grams) ---
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