DIN EN 62047-12:2012-06

This document specifies a method for fatigue testing using the resonant vibration of the microscale mechanical structures of MEMS (micro-electromechanical systems) and micromachines. This document applies to vibrating structures ranging in size from 10 µm to 1000 µm in the plane direction and from 1 µm to 100 µm in thickness, and test materials measuring under 1 mm in length, under 1 mm in width, and between 0,1 µm and 10 µm in thickness.