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DIN EN 62047-17:2011-06
Semiconductor devices - Micro- electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin film (IEC 47F/78/CD:2011)
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Summary
This document specifies the methods for performing bulge tests on free-standing film specimen with a frame surrounding the bulging window. The film specimen is fabricated with micro/nano structural film materials. The thickness of the film is in the range of 0,1 µm to 10 µm.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 06/01/2011 |
| Cancellation Date | 12/01/2015 |
| Page Count | 45 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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