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DIN EN 62047-28:2015-09
Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices (IEC 47F/220/CD:2015)
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Summary
This document specifies terms and definitions, and performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. The document applies to vibration driven electret energy harvesting devices whose electrodes are made of electrically charged dielectric material with gap below 1000 µm.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 09/01/2015 |
| Cancellation Date | 11/01/2017 |
| Page Count | 27 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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