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DIN EN 62047-30:2016-08
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film (IEC 47F/241/CD:2016)
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Summary
This document specifies measuring methods and its reporting schema of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 08/01/2016 |
| Cancellation Date | 07/01/2018 |
| Page Count | 34 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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