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DIN EN 62047-4:2011-03
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 62047-4:2008); German version EN 62047-4:2010
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Summary
This part of DIN EN 62047 describes generic specifications for MEMS, which are the basis for specifications given in other parts of this series for various types of MEMS applications. This standard specifies general procedures for quality assessment to be used in the IECQ-CECC system and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. MEMS described in this standard are basically made of semiconductor material.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 03/01/2011 |
| Page Count | 22 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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