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DIN EN 62047-6:2010-07
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009); German version EN 62047-6:2010
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Summary
This standard specifies a method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1mm and a thickness in the range between 0,1 µm and 10 µm under constant load amplitude or constant displacement amplitude. Thin films are used as main structural materials for MEMS and micromachines.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 07/01/2010 |
| Page Count | 17 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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